Meaning
Measurement technique utilizes the superposition of light waves to analyze sub-nanometer variations in surface shape or optical path length. By splitting a coherent light beam and recombining it after one part interacts with a test sample, this method produces interference patterns that reveal tiny physical deviations. In advanced manufacturing, interferometry is the primary method for qualifying the flatness of silicon wafers and the precision of optical lenses.
Measurement Principle
Comparing the test wavefront against a reference wavefront reveals the deviation from the ideal shape. The resulting pattern of light and dark bands corresponds to differences in the optical path. Highly accurate algorithms convert these patterns into three-dimensional maps of the surface under test.
Metrology Application
Testing high-precision components during production ensures they meet design specifications before final assembly. It helps identify errors in polishing or grinding without making physical contact with the sensitive surfaces. This non-contact approach prevents damage to delicate coatings.
Environmental Control
Isolating the equipment from thermal drift and acoustic noise is necessary to ensure consistent results. Even minor temperature changes can alter the refraction index of the air or cause thermal expansion in the mounting fixtures. Stable laboratory conditions are therefore mandatory for this optical testing method.